A compact modular multi-wavelength (200-850nm) rotating-analyzer ellipsometer for optical constant characterization of nanostructured material
Penulis/Author
AGUS PUTRA DANA (1); Puthut Dwi Jatmiko, A.Md.T. (2); Prof. Dr.Eng. Edi Suharyadi, S.Si., M.Eng. (3); Dr. Iman Santoso, S.Si., M.Sc. (4)
Tanggal/Date
2 2020
Kata Kunci/Keyword
Abstrak/Abstract
We have developed a compact modular rotating-analyzer ellipsometer (RAE) with a spectrum range of 200-850 nm. Spectroscopic ellipsometry (SE) is a nondestructive optical characterization method and is widely used to obtain the dielectric constant, thickness, and surface roughness of thin films. Our homemade RAE comprises standard modular components that available in the market, such as: (1) Deuterium-Halogen DH-2000-BAL light source made by Ocean Optics, (2) rochon prism with -BBO substrate from Edmund Optics for the polarizer and analyzer, (3) Red Tide USB650UV mini detector from Ocean Optics and a compact design of ellipsometer arm to ensure the easiness for its usage and future development. Data acquisition is automated and can be controlled using a computer program, and all the moving parts are motorized. The dielectric constant of Au film with thickness of 300 nm has been measured for calibration of the apparatus. The result was compared with the reference measurements that used commercial ellipsometer and it showed considerable accuracy with the similarity of ~95%.
